Spectroscopic second harmonic generation as a diagnostic tool in silicon materials processing

J.J.H. Gielis, A.A.E. Stevens, P.M. Gevers, H.C.W. Beijerinck, M.C.M. Sanden, van de, W.M.M. Kessels

Research output: Contribution to journalArticleAcademicpeer-review

2 Citations (Scopus)
1 Downloads (Pure)
Original languageEnglish
Pages (from-to)3968-3972
JournalPhysica Status Solidi C: Conferences
Volume2
Issue number12
DOIs
Publication statusPublished - 2005

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