Spectroscopic rotating compensator ellipsometry in the infrared: retarder design and measurement

J.H.W.G. Boer, den; G.M.W. Kroesen; F.J. Hoog, de

doi:10.1088/0957-0233/8/5/004

Spectroscopic rotating compensator ellipsometry in the infrared: retarder design and measurement

J.H.W.G. Boer, den, G.M.W. Kroesen, F.J. Hoog, de

Research output: Contribution to journal › Article › Academic › peer-review

10 Citations (Scopus)

1 Downloads (Pure)

Abstract

Rotating compensator ellipsometry (RCE) is an approach to ellipsometry that is superior to the widely used rotating analyser ellipsometry (RAE). An essential component in RCE is a retarder that generates a retardance close to . In contrast to RCE at a single wavelength, spectroscopic RCE requires a retarder that performs well over a wide range of the used spectrum. The designed retarder is capable of this and works on the principle of total internal reflection. Making use of this retarder, RCE is tested by measuring the optical characteristics of a Teflon-like layer on an aluminium substrate. The results show good agreement with similar RAE measurements, as well as data calculated from an ellipsometric model.

Original language	English
Pages (from-to)	484-492
Journal	Measurement Science and Technology
Volume	8
DOIs	https://doi.org/10.1088/0957-0233/8/5/004
Publication status	Published - 1997

Access to Document

10.1088/0957-0233/8/5/004

Cite this

@article{8fb8d5b9eb5a474cb8970a8952bc284b,

title = "Spectroscopic rotating compensator ellipsometry in the infrared: retarder design and measurement",

abstract = "Rotating compensator ellipsometry (RCE) is an approach to ellipsometry that is superior to the widely used rotating analyser ellipsometry (RAE). An essential component in RCE is a retarder that generates a retardance close to . In contrast to RCE at a single wavelength, spectroscopic RCE requires a retarder that performs well over a wide range of the used spectrum. The designed retarder is capable of this and works on the principle of total internal reflection. Making use of this retarder, RCE is tested by measuring the optical characteristics of a Teflon-like layer on an aluminium substrate. The results show good agreement with similar RAE measurements, as well as data calculated from an ellipsometric model.",

author = "{Boer, den}, J.H.W.G. and G.M.W. Kroesen and {Hoog, de}, F.J.",

year = "1997",

doi = "10.1088/0957-0233/8/5/004",

language = "English",

volume = "8",

pages = "484--492",

journal = "Measurement Science and Technology",

issn = "0957-0233",

publisher = "IOP Publishing Ltd.",

}

TY - JOUR

T1 - Spectroscopic rotating compensator ellipsometry in the infrared: retarder design and measurement

AU - Boer, den, J.H.W.G.

AU - Kroesen, G.M.W.

AU - Hoog, de, F.J.

PY - 1997

Y1 - 1997

N2 - Rotating compensator ellipsometry (RCE) is an approach to ellipsometry that is superior to the widely used rotating analyser ellipsometry (RAE). An essential component in RCE is a retarder that generates a retardance close to . In contrast to RCE at a single wavelength, spectroscopic RCE requires a retarder that performs well over a wide range of the used spectrum. The designed retarder is capable of this and works on the principle of total internal reflection. Making use of this retarder, RCE is tested by measuring the optical characteristics of a Teflon-like layer on an aluminium substrate. The results show good agreement with similar RAE measurements, as well as data calculated from an ellipsometric model.

AB - Rotating compensator ellipsometry (RCE) is an approach to ellipsometry that is superior to the widely used rotating analyser ellipsometry (RAE). An essential component in RCE is a retarder that generates a retardance close to . In contrast to RCE at a single wavelength, spectroscopic RCE requires a retarder that performs well over a wide range of the used spectrum. The designed retarder is capable of this and works on the principle of total internal reflection. Making use of this retarder, RCE is tested by measuring the optical characteristics of a Teflon-like layer on an aluminium substrate. The results show good agreement with similar RAE measurements, as well as data calculated from an ellipsometric model.

U2 - 10.1088/0957-0233/8/5/004

DO - 10.1088/0957-0233/8/5/004

M3 - Article

SN - 0957-0233

VL - 8

SP - 484

EP - 492

JO - Measurement Science and Technology

JF - Measurement Science and Technology

ER -

Spectroscopic rotating compensator ellipsometry in the infrared: retarder design and measurement

Abstract

Access to Document

Fingerprint

Cite this