Spectroscopic rotating compensator ellipsometry in the infrared: retarder design and measurement

J.H.W.G. Boer, den, G.M.W. Kroesen, F.J. Hoog, de

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9 Citations (Scopus)
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Abstract

Rotating compensator ellipsometry (RCE) is an approach to ellipsometry that is superior to the widely used rotating analyser ellipsometry (RAE). An essential component in RCE is a retarder that generates a retardance close to . In contrast to RCE at a single wavelength, spectroscopic RCE requires a retarder that performs well over a wide range of the used spectrum. The designed retarder is capable of this and works on the principle of total internal reflection. Making use of this retarder, RCE is tested by measuring the optical characteristics of a Teflon-like layer on an aluminium substrate. The results show good agreement with similar RAE measurements, as well as data calculated from an ellipsometric model.
Original languageEnglish
Pages (from-to)484-492
JournalMeasurement Science and Technology
Volume8
DOIs
Publication statusPublished - 1997

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