Spectroscopic IR ellipsometry with imperfect components

J.H.W.G. Boer, den; G.M.W. Kroesen; M. Haverlag; F.J. Hoog, de

doi:10.1016/0040-6090(93)90278-W

Spectroscopic IR ellipsometry with imperfect components

J.H.W.G. Boer, den, G.M.W. Kroesen, M. Haverlag, F.J. Hoog, de

Research output: Contribution to journal › Article › Academic › peer-review

13 Citations (Scopus)

Abstract

In this paper the effect of imperfect components in a spectroscopic IR ellipsometer on the ellipsometer behaviour is investigated. Polarizers, source and detector are described by Mueller matrices. A possibility of constructing better wire grid polarizers is discussed. Calculations are performed analytically, leading to new criteria for the calibration of a spectroscopic ellipsometer.

Original language	English
Pages (from-to)	323-326
Journal	Thin Solid Films
Volume	234
Issue number	1-2
DOIs	https://doi.org/10.1016/0040-6090(93)90278-W
Publication status	Published - 1993

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@article{9170159347eb4201b52b54e20e1432de,

title = "Spectroscopic IR ellipsometry with imperfect components",

abstract = "In this paper the effect of imperfect components in a spectroscopic IR ellipsometer on the ellipsometer behaviour is investigated. Polarizers, source and detector are described by Mueller matrices. A possibility of constructing better wire grid polarizers is discussed. Calculations are performed analytically, leading to new criteria for the calibration of a spectroscopic ellipsometer.",

author = "{Boer, den}, J.H.W.G. and G.M.W. Kroesen and M. Haverlag and {Hoog, de}, F.J.",

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doi = "10.1016/0040-6090(93)90278-W",

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T1 - Spectroscopic IR ellipsometry with imperfect components

AU - Boer, den, J.H.W.G.

AU - Kroesen, G.M.W.

AU - Haverlag, M.

AU - Hoog, de, F.J.

PY - 1993

Y1 - 1993

N2 - In this paper the effect of imperfect components in a spectroscopic IR ellipsometer on the ellipsometer behaviour is investigated. Polarizers, source and detector are described by Mueller matrices. A possibility of constructing better wire grid polarizers is discussed. Calculations are performed analytically, leading to new criteria for the calibration of a spectroscopic ellipsometer.

AB - In this paper the effect of imperfect components in a spectroscopic IR ellipsometer on the ellipsometer behaviour is investigated. Polarizers, source and detector are described by Mueller matrices. A possibility of constructing better wire grid polarizers is discussed. Calculations are performed analytically, leading to new criteria for the calibration of a spectroscopic ellipsometer.

U2 - 10.1016/0040-6090(93)90278-W

DO - 10.1016/0040-6090(93)90278-W

M3 - Article

SN - 0040-6090

VL - 234

SP - 323

EP - 326

JO - Thin Solid Films

JF - Thin Solid Films

IS - 1-2

ER -

Spectroscopic IR ellipsometry with imperfect components

Abstract

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