Spectroscopic infra red ellipsometry

G.M.W. Kroesen, M.S. de Wit, Y.L.M. Creijghton, F.J. Hoog, de, D.C. Schram

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

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Original languageEnglish
Title of host publication9th international symposium on plasma chemistry, Pugnochiuso, Italy, September 4-8, 1989, vol. 1
EditorsR. d'Agostino
Place of Publications.l.
Publication statusPublished - 1989

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