Spectroscopic infra red ellipsometry

G.M.W. Kroesen; M.S. de Wit; Y.L.M. Creijghton; F.J. Hoog, de; D.C. Schram

Spectroscopic infra red ellipsometry

G.M.W. Kroesen, M.S. de Wit, Y.L.M. Creijghton, F.J. Hoog, de, D.C. Schram

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

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Original language	English
Title of host publication	9th international symposium on plasma chemistry, Pugnochiuso, Italy, September 4-8, 1989, vol. 1
Editors	R. d'Agostino
Place of Publication	s.l.
Publisher	s.n.
Pages	446-451
Publication status	Published - 1989

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Cite this

@inproceedings{5410e19be1f24e7cb3ae52542c8543d0,

title = "Spectroscopic infra red ellipsometry",

author = "G.M.W. Kroesen and {de Wit}, M.S. and Y.L.M. Creijghton and {Hoog, de}, F.J. and D.C. Schram",

year = "1989",

language = "English",

pages = "446--451",

editor = "R. d'Agostino",

booktitle = "9th international symposium on plasma chemistry, Pugnochiuso, Italy, September 4-8, 1989, vol. 1",

publisher = "s.n.",

}

Spectroscopic infra red ellipsometry. / Kroesen, G.M.W.; de Wit, M.S.; Creijghton, Y.L.M.; Hoog, de, F.J.; Schram, D.C.

9th international symposium on plasma chemistry, Pugnochiuso, Italy, September 4-8, 1989, vol. 1 . ed. / R. d'Agostino. s.l. : s.n., 1989. p. 446-451.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic