Spectral behavior of cascade arc plasma jet in Ar/H2/SiH4

G.J. Meeusen; G. Dinescu; R.F.G. Meulenbroeks; M.C.M. Sanden, van de; D.C. Schram

Spectral behavior of cascade arc plasma jet in Ar/H2/SiH4

G.J. Meeusen
, G. Dinescu
, R.F.G. Meulenbroeks
, M.C.M. Sanden, van de
, D.C. Schram

Plasma & Materials Processing

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

62 Downloads (Pure)

Original language	English
Title of host publication	ISPC ... : international symposium on plasma chemistry, 11th, Loughborough, England, August 22-27, 1993, vol. 1
Editors	J.E. Harry
Place of Publication	s.l.
Publisher	International Union of Pure and Applied Chemistry
Pages	350-355
Publication status	Published - 1993

Access to Document

590829Final published version, 300 KB

Cite this

@inproceedings{dcde50731633428da935e141d97cb9b9,

title = "Spectral behavior of cascade arc plasma jet in Ar/H2/SiH4",

author = "G.J. Meeusen and G. Dinescu and R.F.G. Meulenbroeks and \{Sanden, van de\}, M.C.M. and D.C. Schram",

year = "1993",

language = "English",

pages = "350--355",

editor = "J.E. Harry",

booktitle = "ISPC ... : international symposium on plasma chemistry, 11th, Loughborough, England, August 22-27, 1993, vol. 1",

publisher = "International Union of Pure and Applied Chemistry",

}

Spectral behavior of cascade arc plasma jet in Ar/H2/SiH4. / Meeusen, G.J.; Dinescu, G.; Meulenbroeks, R.F.G. et al.
ISPC ... : international symposium on plasma chemistry, 11th, Loughborough, England, August 22-27, 1993, vol. 1 . ed. / J.E. Harry. s.l.: International Union of Pure and Applied Chemistry, 1993. p. 350-355.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

TY - GEN

T1 - Spectral behavior of cascade arc plasma jet in Ar/H2/SiH4

AU - Meeusen, G.J.

AU - Dinescu, G.

AU - Meulenbroeks, R.F.G.

AU - Sanden, van de, M.C.M.

AU - Schram, D.C.

PY - 1993

Y1 - 1993

M3 - Conference contribution

SP - 350

EP - 355

BT - ISPC ... : international symposium on plasma chemistry, 11th, Loughborough, England, August 22-27, 1993, vol. 1

A2 - Harry, J.E.

PB - International Union of Pure and Applied Chemistry

CY - s.l.

ER -