Original language | English |
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Title of host publication | ISPC ... : international symposium on plasma chemistry, 11th, Loughborough, England, August 22-27, 1993, vol. 1 |
Editors | J.E. Harry |
Place of Publication | s.l. |
Publisher | International Union of Pure and Applied Chemistry |
Pages | 350-355 |
Publication status | Published - 1993 |
Spectral behavior of cascade arc plasma jet in Ar/H2/SiH4
G.J. Meeusen, G. Dinescu, R.F.G. Meulenbroeks, M.C.M. Sanden, van de, D.C. Schram
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic
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