Spectral behavior of cascade arc plasma jet in Ar/H2/SiH4

G.J. Meeusen, G. Dinescu, R.F.G. Meulenbroeks, M.C.M. Sanden, van de, D.C. Schram

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

29 Downloads (Pure)
Original languageEnglish
Title of host publicationISPC ... : international symposium on plasma chemistry, 11th, Loughborough, England, August 22-27, 1993, vol. 1
EditorsJ.E. Harry
Place of Publications.l.
PublisherInternational Union of Pure and Applied Chemistry
Pages350-355
Publication statusPublished - 1993

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