Spec-Check : a decision support system for the designing of tuning processes at ASML

Research output: Thesis › EngD Thesis

Original language	English
Supervisors/Advisors	Wessels, J., Supervisor Lenders, H.J.P., External supervisor Kok, J.E.M., External supervisor
Award date	1 Jan 2000
Place of Publication	Eindhoven
Publisher	Technische Universiteit Eindhoven. Stan Ackermans Instituut
Print ISBNs	90-444-0064-9
Publication status	Published - 2000

Eindverslag

Cite this

@phdthesis{5ac39a7e0efe422585c18a38c87218f8,

title = "Spec-Check : a decision support system for the designing of tuning processes at ASML",

author = "\{de Kok\}, R.B.J.",

note = "Eindverslag",

year = "2000",

language = "English",

isbn = "90-444-0064-9",

publisher = "Technische Universiteit Eindhoven. Stan Ackermans Instituut",

type = "EngD Thesis",

}