Spec-Check : a decision support system for the designing of tuning processes at ASML

R.B.J. Kok, de, Technische Universiteit Eindhoven (TUE). Stan Ackermans Instituut. Mathematics for Industry (MI)

Research output: Thesis › EngD Thesis

Original language	English
Qualification	Doctor of Philosophy
Awarding Institution
Supervisors/Advisors	Wessels, J., Supervisor Lenders, H.J.P., External supervisor Kok, J.E.M., External supervisor
Award date	1 Jan 2000
Place of Publication	Eindhoven
Publisher	Technische Universiteit Eindhoven. Stan Ackermans Instituut
Print ISBNs	90-444-0064-9
Publication status	Published - 2000

Eindverslag

Cite this

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title = "Spec-Check : a decision support system for the designing of tuning processes at ASML",

author = "{Kok, de}, R.B.J. and {Technische Universiteit Eindhoven (TUE). Stan Ackermans Instituut. Mathematics for Industry (MI)}",

note = "Eindverslag",

year = "2000",

language = "English",

isbn = "90-444-0064-9",

publisher = "Technische Universiteit Eindhoven. Stan Ackermans Instituut",

type = "EngD Thesis",

}

TY - THES

T1 - Spec-Check : a decision support system for the designing of tuning processes at ASML

AU - Kok, de, R.B.J.

AU - Technische Universiteit Eindhoven (TUE). Stan Ackermans Instituut. Mathematics for Industry (MI)

N1 - Eindverslag

PY - 2000

Y1 - 2000

M3 - EngD Thesis

SN - 90-444-0064-9

PB - Technische Universiteit Eindhoven. Stan Ackermans Instituut

CY - Eindhoven

ER -