Spec-Check : a decision support system for the designing of tuning processes at ASML

R.B.J. Kok, de, Technische Universiteit Eindhoven (TUE). Stan Ackermans Instituut. Mathematics for Industry (MI)

    Research output: ThesisEngD Thesis

    Original languageEnglish
    QualificationDoctor of Philosophy
    Awarding Institution
    • Wessels, J., Supervisor
    • Lenders, H.J.P., External supervisor
    • Kok, J.E.M., External supervisor
    Award date1 Jan 2000
    Place of PublicationEindhoven
    Print ISBNs90-444-0064-9
    Publication statusPublished - 2000

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