Spatially resolved high resolution interferometry

G.M.W. Kroesen, T.H.J. Bisschops, R.H.M. Sanders, A.W. Jansen, D.C. Schram, F.J. Hoog, de

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Abstract. The construction of a cheap but very stable and accurate Michelson interferometer is described. To avoid (expensive) lock-in techniques a DC feedback loop has been implemented. A major advantage of this system is that the signal is proportional to the optical path length change itself, and not to the sine thereof. The frequency stabilization of the He-Ne laser used-necessary to attain the desired high resolution-is outlined. the Abel inversion procedure, used in a cylindrically symmetrical situation to convert lateral measurements into radial profiles, is discussed. A length-equivalent accuracy of about 0.1 nm has been accomplished. The system has been used to measure the radial profile of the refractive index of RF plasmas in CF4 and Ar.
Original languageEnglish
Pages (from-to)293-297
JournalMeasurement Science and Technology
Issue number4
Publication statusPublished - 1991


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