Spatially resolved gas temperature measurements by Rayleigh scattering in a microwave discharge

A. Rousseau, E. Teboul, M.J. Sande, van de, J.J.A.M. Mullen, van der

Research output: Contribution to journalArticleAcademicpeer-review

21 Citations (Scopus)

Abstract

Rayleigh scattering is used in order to deduce the gas temperature from neutral density measurements inside a microwave discharge in argon. Rayleigh scattering is a powerful non-intrusive method which provides direct heavy particle density measurements with a very high spatial resolution. The gas pressure ranges from 1 to 40 torr and the microwave power ranges from 35 to 900 W. We show that temperature gradient is very sharp at the edge of the plasma column: T/sub g/ drops to nearly room temperature within 3 cm. In contrast, Tg is nearly constant in the bulk of the plasma region. The gas temperature is determined over a large range of power and pressure conditions. We show that the gas temperature in the Centre of the tube, ranging from 300 to 2500 K, is a linear function of the averaged power density per unit of length. Analytical calculations are in good agreement with experimental results
Original languageEnglish
Pages (from-to)47-52
JournalPlasma Sources Science and Technology
Volume11
Issue number1
DOIs
Publication statusPublished - 2002

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