Spatial atmospheric atomic layer deposition of InxGayZnzO for thin film transistors

A. Illiberi, B. Cobb, A. Sharma, T. Grehl, H.H. Brongersma, F. Roozeboom, G.H. Gelinck, P. Poodt

Research output: Contribution to journal › Article › Academic › peer-review

54 Citations (Scopus)
5 Downloads (Pure)

Fingerprint

Dive into the research topics of 'Spatial atmospheric atomic layer deposition of InxGayZnzO for thin film transistors'. Together they form a unique fingerprint.

Material Science

Engineering

Chemical Engineering