Spatial atmospheric ALD of functional layers for CIGS Solar Cells

A. Illiberi, C. Frijters, J. E. Balder, P. Poodt, F. Roozeboom

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

8 Citations (Scopus)
2 Downloads (Pure)

Abstract

Spatial Atmospheric Atomic Layer Deposition combines the advantages of temporal ALD, i.e. excellent control of film composition and uniformity over large area substrates, with high growth rates (up to nm/s). In this paper we present a short overview of our research activity carried out on S-ALD of functional thin films for the front window of copper indium gallium di-selenide (CIGS) solar cells. Zn(O,S) and ZnO:Al are grown by co-injecting the vaporized precursors of the cationic (O, S) and anionic (Zn, Al) elements, respectively. An insight on the growth characteristics and properties of Zn(O,S) and ZnO:Al is presented.

Original languageEnglish
Title of host publicationAtomic Layer Deposition Applications 11
PublisherElectrochemical Society, Inc.
Pages31-37
Number of pages7
Volume69
Edition7
ISBN (Electronic)9781607685395
DOIs
Publication statusPublished - 2015
EventSymposium on Atomic Layer Deposition Applications 11 - Phoenix, United States
Duration: 13 Oct 201515 Oct 2015

Publication series

NameECS Transactions
Volume69
ISSN (Print)1938-6737

Conference

ConferenceSymposium on Atomic Layer Deposition Applications 11
CountryUnited States
CityPhoenix
Period13/10/1515/10/15
OtherPart of: 228th ECS Meeting (GO1)

Fingerprint Dive into the research topics of 'Spatial atmospheric ALD of functional layers for CIGS Solar Cells'. Together they form a unique fingerprint.

Cite this