Spatial atmospheric ALD of functional layers for CIGS Solar Cells

A. Illiberi, C. Frijters, J. E. Balder, P. Poodt, F. Roozeboom

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

8 Citations (Scopus)
2 Downloads (Pure)


Spatial Atmospheric Atomic Layer Deposition combines the advantages of temporal ALD, i.e. excellent control of film composition and uniformity over large area substrates, with high growth rates (up to nm/s). In this paper we present a short overview of our research activity carried out on S-ALD of functional thin films for the front window of copper indium gallium di-selenide (CIGS) solar cells. Zn(O,S) and ZnO:Al are grown by co-injecting the vaporized precursors of the cationic (O, S) and anionic (Zn, Al) elements, respectively. An insight on the growth characteristics and properties of Zn(O,S) and ZnO:Al is presented.

Original languageEnglish
Title of host publicationAtomic Layer Deposition Applications 11
PublisherElectrochemical Society, Inc.
Number of pages7
ISBN (Electronic)9781607685395
Publication statusPublished - 2015
EventSymposium on Atomic Layer Deposition Applications 11 - Phoenix, United States
Duration: 13 Oct 201515 Oct 2015

Publication series

NameECS Transactions
ISSN (Print)1938-6737


ConferenceSymposium on Atomic Layer Deposition Applications 11
Country/TerritoryUnited States
OtherPart of: 228th ECS Meeting (GO1)


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