Spatial atmospheric ALD of functional layers for CIGS Solar Cells

A. Illiberi; C. Frijters; J. E. Balder; P. Poodt; F. Roozeboom

doi:10.1149/06907.0031ecst

Spatial atmospheric ALD of functional layers for CIGS Solar Cells

A. Illiberi, C. Frijters, J. E. Balder, P. Poodt, F. Roozeboom

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

8 Citations (Scopus)

2 Downloads (Pure)

Abstract

Spatial Atmospheric Atomic Layer Deposition combines the advantages of temporal ALD, i.e. excellent control of film composition and uniformity over large area substrates, with high growth rates (up to nm/s). In this paper we present a short overview of our research activity carried out on S-ALD of functional thin films for the front window of copper indium gallium di-selenide (CIGS) solar cells. Zn(O,S) and ZnO:Al are grown by co-injecting the vaporized precursors of the cationic (O, S) and anionic (Zn, Al) elements, respectively. An insight on the growth characteristics and properties of Zn(O,S) and ZnO:Al is presented.

Original language	English
Title of host publication	Atomic Layer Deposition Applications 11
Publisher	Electrochemical Society, Inc.
Pages	31-37
Number of pages	7
Volume	69
Edition	7
ISBN (Electronic)	9781607685395
DOIs	https://doi.org/10.1149/06907.0031ecst https://doi.org/10.1149/06907.0031ecst
Publication status	Published - 2015
Event	Symposium on Atomic Layer Deposition Applications 11 - Phoenix, United States Duration: 13 Oct 2015 → 15 Oct 2015

Publication series

Name	ECS Transactions
Volume	69
ISSN (Print)	1938-6737

Conference

Conference	Symposium on Atomic Layer Deposition Applications 11
Country	United States
City	Phoenix
Period	13/10/15 → 15/10/15
Other	Part of: 228th ECS Meeting (GO1)

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title = "Spatial atmospheric ALD of functional layers for CIGS Solar Cells",

abstract = "Spatial Atmospheric Atomic Layer Deposition combines the advantages of temporal ALD, i.e. excellent control of film composition and uniformity over large area substrates, with high growth rates (up to nm/s). In this paper we present a short overview of our research activity carried out on S-ALD of functional thin films for the front window of copper indium gallium di-selenide (CIGS) solar cells. Zn(O,S) and ZnO:Al are grown by co-injecting the vaporized precursors of the cationic (O, S) and anionic (Zn, Al) elements, respectively. An insight on the growth characteristics and properties of Zn(O,S) and ZnO:Al is presented.",

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pages = "31--37",

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note = "Symposium on Atomic Layer Deposition Applications 11 ; Conference date: 13-10-2015 Through 15-10-2015",

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Illiberi, A, Frijters, C, Balder, JE, Poodt, P & Roozeboom, F 2015, Spatial atmospheric ALD of functional layers for CIGS Solar Cells. in Atomic Layer Deposition Applications 11. 7 edn, vol. 69, ECS Transactions, vol. 69, Electrochemical Society, Inc., pp. 31-37, Symposium on Atomic Layer Deposition Applications 11, Phoenix, United States, 13/10/15. https://doi.org/10.1149/06907.0031ecst, https://doi.org/10.1149/06907.0031ecst

Spatial atmospheric ALD of functional layers for CIGS Solar Cells. / Illiberi, A.; Frijters, C.; Balder, J. E.; Poodt, P.; Roozeboom, F.

Atomic Layer Deposition Applications 11. Vol. 69 7. ed. Electrochemical Society, Inc., 2015. p. 31-37 (ECS Transactions; Vol. 69).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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