Space resolved excitation mechanism and argon ion transport in a high density ICP Reactor

N. Sadeghi, M. Grift, van de, T. Hbid, G.M.W. Kroesen, F.J. Hoog, de

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Abstract

The need for rapid and large area wafer processing in the semiconductor industry has increased the interest in high density plasma sources and particularly in the inductively coupled plasma (ICP) reactors. To fully exploit the possibilities in these reactors, of independent control of plasma generation and wafer biasing, we need to understand how ions are formed and how they gain energy before impinging on the wafer surface. In this work, we used the Doppler-shifted-laser-induced-fluorescence (DSLIF) technique to study the spatial evolution of the velocity distribution function (vdf) of the Ar+* (2G9/2) metastable ions in an ICP device. Both vdf parallel, f(vll), and perpendicular, f(v), to the top glass plate have been determined. Space resolved emission spectroscopy is used to understand the excitation mechanisms of the excited states of argon ion. The space dependent electron density and temperature have also been obtained with a movable Langmuir probe. The experimental results are compared with a global model (for ne and Te) and a Monte Carlo model (for velocity distribution function) (4 References).
Original languageEnglish
Title of host publicationProceedings of the 23th International Conference on Phenomena in Ionised Gases (XXIII ICPIG 1997), 17-22 July 1997, Toulouse France
EditorsM.C. Bordage, A. Gleizes
Place of PublicationToulouse
PublisherUniversite Paul Sabatier
PagesIV-246-IV-247
Volume4
Publication statusPublished - 1997
Event23rd International Conference on Phenomena in Ionized Gases (ICPIG 1997) - Toulouse, France
Duration: 17 Jul 199722 Jul 1997

Conference

Conference23rd International Conference on Phenomena in Ionized Gases (ICPIG 1997)
Abbreviated titleICPIG 1997
Country/TerritoryFrance
CityToulouse
Period17/07/9722/07/97

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