Some studies on the deformation of the membrane in an RF MEMS switch

V.R. Ambati, A. Asheim, J.B. Berg, van den, Y. Gennip, van, T. Gerasimov, A.V. Hlod, R. Planqué, M. Schans, van der, S. Stelt, van der, M. Vargas Rivera, E. Vondenhoff

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Physics & Astronomy