Smectic hybrid oligo(dimethylsiloxane) liquid crystal for nanopatterning

K. Nickmans, A.P.H.J. Schenning

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

2 Citations (Scopus)


Block copolymer self-assembly is a candidate resolution enhancement technique for patterning at future technology nodes. The technology is based on the micro-phase separation of chemically immiscible (eg polar/apolar) block copolymers that contain etch contrast (eg. organic/inorganic) into regular patterns (eg. lamellar or cylindrical) with periodicities between 10 - 100 nm. One of the challenges that remain for the implementation of self-assembly in nanopatterning is extendibility of the technology to smaller features. In contrast to block copolymers, liquid crystals are able to self-assemble at the molecular length scale (1-10 nm). The current work reports on a liquid crystal with inherent etch contrast and its self-assembly behavior. A monodisperse oligo(dimethylsiloxane) liquid crystal is synthesized via hydrosilylation and characterized. The formation of a temperature dependent tilted smectic phase with a periodicity of approximately 3.0 nm is demonstrated via differential scanning calorimetry, polarized optical microscopy, and x-ray diffraction. The director tilt is highly dependent on temperature (20° - 70°), while the layer spacing is relatively temperature independent (2.99 - 3.03 nm). Finally, we show that the liquid crystal forms lamellar sheets in thin films.

Original languageEnglish
Title of host publicationEmerging Liquid Crystal Technologies XII 2017
Place of PublicationBellingham
Number of pages9
ISBN (Electronic)9781510606913
ISBN (Print)978-1-5106-0692-0
Publication statusPublished - 1 Jan 2017
Event12th Emerging Liquid Crystal Technologies Conference (ELCT 2017) - San Francisco, United States
Duration: 31 Jan 20172 Feb 2017
Conference number: 12

Publication series

NameProceedings of SPIE


Conference12th Emerging Liquid Crystal Technologies Conference (ELCT 2017)
Abbreviated titleELCT 2017
Country/TerritoryUnited States
CitySan Francisco


  • high-χ
  • lamellar
  • liquid crystal
  • Nanopatterning
  • ODMS
  • PDMS
  • phase transition
  • smectic
  • thermotropic
  • thin film


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