Slot-die coating of soluble metal oxide semiconductor towards high-performance, high-resolution self-aligned TFT backplanes

Nias Katsouras, Marko Marinkovic, Joris Maas, Duy Vu Pham, Ralf Anselmann, Gerwin Gelinck

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Abstract

We report slot-die coating of the indium oxide-based iXsenic S precursor solution, and its first robust integration into high-performing thin-film transistors with a self-aligned anhitecture. We demonstrate excellent performance and uniformity of the resulting TFTs. Our results are a key ingredient towards roll-to-roll printed, high-resolution TFT arrays.

Original languageEnglish
Title of host publication24th International Display Workshops, IDW 2017
Place of PublicationRed Hook
PublisherCurran Associates
Pages328-331
Number of pages4
ISBN (Electronic)9781510858992
Publication statusPublished - 1 Jan 2017
Event24th International Display Workshops (IDW 2017) - Sendai, Japan
Duration: 6 Dec 20178 Dec 2017
Conference number: 24

Conference

Conference24th International Display Workshops (IDW 2017)
Abbreviated titleIDW 2017
Country/TerritoryJapan
CitySendai
Period6/12/178/12/17

Keywords

  • High resolution
  • Metal oxide semiconductor
  • Self-aligned TFT
  • Slot-die coating
  • Solution processable

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