Simulation of a triode plasma-assisted chemical vapour system

J.H. Breda, van, A.G. Dias, W.G. Haije, D.C. Schram

    Research output: Contribution to conferencePoster

    9 Downloads (Pure)
    Original languageEnglish
    Number of pages1
    Publication statusPublished - 1995
    Event4th International Conference on Plasma Surface Engineering - Garmisch-Partenkirchen, Germany
    Duration: 19 Sep 199423 Sep 1994

    Conference

    Conference4th International Conference on Plasma Surface Engineering
    CountryGermany
    CityGarmisch-Partenkirchen
    Period19/09/9423/09/94

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