Silicon nitride layer deposition using cascaded arc plasmas

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Original language	English
Title of host publication	AVS, American Vacuum Society : 42nd national symposium, Minneapolis, October 16-20, 1995, final program
Pages	253
Publication status	Published - 1995

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@inproceedings{ebba2f1cb1824aee98095d3c9aaba3bd,

title = "Silicon nitride layer deposition using cascaded arc plasmas",

author = "R.M.J. Paffen and {Sanden, van de}, M.C.M. and D.C. Schram",

year = "1995",

language = "English",

pages = "253",

booktitle = "AVS, American Vacuum Society : 42nd national symposium, Minneapolis, October 16-20, 1995, final program",

}