Silicon nitride deposition using expanding cascaded arc plasmas

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

24 Downloads (Pure)
Original languageEnglish
Title of host publicationPlasmatechnologie: 7. Bundesdeutsche Fachtagung, 13.-14. Maerz 1996, Rub-Bochum
Pages88
Publication statusPublished - 1996

Cite this