Silicon nitride deposition using expanding cascaded arc plasmas

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

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Original languageEnglish
Title of host publicationPlasmatechnologie: 7. Bundesdeutsche Fachtagung, 13.-14. Maerz 1996, Rub-Bochum
Pages88
Publication statusPublished - 1996

Cite this

Paffen, R. M. J., Sanden, van de, M. C. M., & Schram, D. C. (1996). Silicon nitride deposition using expanding cascaded arc plasmas. In Plasmatechnologie: 7. Bundesdeutsche Fachtagung, 13.-14. Maerz 1996, Rub-Bochum (pp. 88)
Paffen, R.M.J. ; Sanden, van de, M.C.M. ; Schram, D.C. / Silicon nitride deposition using expanding cascaded arc plasmas. Plasmatechnologie: 7. Bundesdeutsche Fachtagung, 13.-14. Maerz 1996, Rub-Bochum. 1996. pp. 88
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title = "Silicon nitride deposition using expanding cascaded arc plasmas",
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Paffen, RMJ, Sanden, van de, MCM & Schram, DC 1996, Silicon nitride deposition using expanding cascaded arc plasmas. in Plasmatechnologie: 7. Bundesdeutsche Fachtagung, 13.-14. Maerz 1996, Rub-Bochum. pp. 88.

Silicon nitride deposition using expanding cascaded arc plasmas. / Paffen, R.M.J.; Sanden, van de, M.C.M.; Schram, D.C.

Plasmatechnologie: 7. Bundesdeutsche Fachtagung, 13.-14. Maerz 1996, Rub-Bochum. 1996. p. 88.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

TY - GEN

T1 - Silicon nitride deposition using expanding cascaded arc plasmas

AU - Paffen, R.M.J.

AU - Sanden, van de, M.C.M.

AU - Schram, D.C.

PY - 1996

Y1 - 1996

M3 - Conference contribution

SP - 88

BT - Plasmatechnologie: 7. Bundesdeutsche Fachtagung, 13.-14. Maerz 1996, Rub-Bochum

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Paffen RMJ, Sanden, van de MCM, Schram DC. Silicon nitride deposition using expanding cascaded arc plasmas. In Plasmatechnologie: 7. Bundesdeutsche Fachtagung, 13.-14. Maerz 1996, Rub-Bochum. 1996. p. 88