| Original language | English |
|---|---|
| Title of host publication | Plasmatechnologie: 7. Bundesdeutsche Fachtagung, 13.-14. Maerz 1996, Rub-Bochum |
| Pages | 88 |
| Publication status | Published - 1996 |
Silicon nitride deposition using expanding cascaded arc plasmas
R.M.J. Paffen, M.C.M. Sanden, van de, D.C. Schram
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic
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