Silicon nitride deposition using expanding cascaded arc plasmas

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

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Original languageEnglish
Title of host publicationPlasmatechnologie: 7. Bundesdeutsche Fachtagung, 13.-14. Maerz 1996, Rub-Bochum
Pages88
Publication statusPublished - 1996

Cite this

Paffen, R. M. J., Sanden, van de, M. C. M., & Schram, D. C. (1996). Silicon nitride deposition using expanding cascaded arc plasmas. In Plasmatechnologie: 7. Bundesdeutsche Fachtagung, 13.-14. Maerz 1996, Rub-Bochum (pp. 88)