Original language | English |
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Title of host publication | ICRP-6/SPP-23 : proceedings of the 6th international conference on reactive plasmas and 23rd symposium on plasma processing : January 24-27, 2006, Matsushima/Sendai, Japan |
Editors | R. Hatakeyama, S. Samukawa |
Pages | 431-432 |
Publication status | Published - 2006 |
Silicon nitride antireflection coatings with excellent surface and bulk passivation properties deposited at high rates by the expanding thermal plasmas
M.C.M. Sanden, van de, B. Hoex, P.J. Oever, van den, A.J.M. van Erven, M.D. Bijker, W.M.M. Kessels
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic
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