Silicon nitride antireflection coatings with excellent surface and bulk passivation properties deposited at high rates by the expanding thermal plasmas

M.C.M. Sanden, van de, B. Hoex, P.J. Oever, van den, A.J.M. van Erven, M.D. Bijker, W.M.M. Kessels

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

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Original languageEnglish
Title of host publicationICRP-6/SPP-23 : proceedings of the 6th international conference on reactive plasmas and 23rd symposium on plasma processing : January 24-27, 2006, Matsushima/Sendai, Japan
EditorsR. Hatakeyama, S. Samukawa
Pages431-432
Publication statusPublished - 2006

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