Silicon based system-in-package: Breakthroughs in miniaturization and 'nano'-integration supported by very high quality passives and system level design tools

Franck Murray, François LeCornec, Serge Bardy, Catherine Bunel, Jan Verhoeven, F.C.M. Van Den Heuvel, J. H. Klootwijk, Fred Roozeboom

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11 Citations (Scopus)


The very large development of home and domestic electronic appliances as well as portable devices has led the microelectronics industry to evolve in two complementary directions: "More Moore" with the continuous race towards extremely small dimensions, hence the development of SoCs (System on Chip) and more recently a new direction that we could name "More than Moore" with the integration of devices that were laying outside the chips and here the creation of SiPs (System in Package). These two approaches are not in competition with one another: this paper will show some examples of integrated nano-systems that use several SoCs. The technology we have developed is called Silicon-Based System in Package.The first products using this technology are now in volume production and used mainly in the field of wireless communication. This new technology relies on four pillars. Passive integration is the first: very efficient and high quality factor capacitors and inductors have been integrated, allowing the creation of complete modules including active devices, filters and decoupling capacitors. High-density MOS capacitors with 1-1000 nF capacitance, and as high values as 25-250+ nF/mm2 specific capacitance have been fabricated in 150 mm diameter Si-wafers, containing over 1 billion macropores. Typically an ESR less than 100 mΩ and an ESL less than 25 pH were found for capacitors over 10 nF. This novel concept is an important step forward in improving the stability of power-amplifier modules by replacing conventional SMD technology. Whereas generations with capacitor densities of up to 100 nF/mm2 will be using "conventional" materials and structures, the next steps in the roadmap will call for new 3D structures and materials such as high-k dielectrics. The second element is advanced packaging. New technologies, such as the assembly of silicon chips onto other silicon chips, also named "double flip-chip" have been developed. This has been made possible thanks to the combination of the most advanced microbumping and die placement techniques, In addition to a tremendous reduction of size (up to a factor of 10 to 20) these techniques have also brought a better repeatability of system performance. The third element has been the development of design tools that allow a seamless system design for engineers used to IC design tools and flows. Our Design Environment allows codesign of multiple-technologies chips and their integration in a single system. This IC-like Design Environment has greatly contributed to the adoption of the technology. Testing is the fourth element and is one of the economical enablers of the technology. The key words are: "Known-Good-Die", RF test, system test, etc. Some innovative RF probing and full on-wafer subsystem testing will be shown. Even though efficient testing is not vital for the technical feasibility of this system integration, it becomes very quickly one of the most important enablers, especially when we deal with very high volumes of production, The conclusion of the paper will be an open door to the future. Some innovations like the integration of solid state lighting devices or even energy storage devices inside our SiPs, will be presented.

Original languageEnglish
Title of host publicationHeterogeneous Integration of Materials for Passive Components and Smart Systems
Subtitle of host publicationsymposium held November 27-29, 2006, Boston, Massachusetts, U.S.A.
EditorsJ.C. Nino
Place of PublicationWarrendale
PublisherMaterials Research Society
Number of pages10
ISBN (Print)9781558999268
Publication statusPublished - 1 Dec 2007
Externally publishedYes
Event2006 Materials Research Society Fall Meeting - Boston, MA, United States
Duration: 27 Nov 20061 Dec 2006

Publication series

NameMaterials Research Society symposium proceedings
ISSN (Print)0272-9172


Conference2006 Materials Research Society Fall Meeting
CountryUnited States
CityBoston, MA

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    Murray, F., LeCornec, F., Bardy, S., Bunel, C., Verhoeven, J., Van Den Heuvel, F. C. M., Klootwijk, J. H., & Roozeboom, F. (2007). Silicon based system-in-package: Breakthroughs in miniaturization and 'nano'-integration supported by very high quality passives and system level design tools. In J. C. Nino (Ed.), Heterogeneous Integration of Materials for Passive Components and Smart Systems: symposium held November 27-29, 2006, Boston, Massachusetts, U.S.A. (pp. 27-36). (Materials Research Society symposium proceedings; Vol. 969). Materials Research Society.