Silane depletion measurements in an expanding thermal plasma

W.M.M. Kessels, L. Gabella, J. Bastiaanssen, R.J. Severens, M.C.M. Sanden, van de, D.C. Schram

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	English
Title of host publication	Proceedings Frontiers in Low Temperature Plasma Diagnostics II, Bad Honnef
Place of Publication	Bad Honnef
Publisher	Arbeitsgemeinschaft Plasmaphysik
Pages	159-162
Publication status	Published - 1997

Cite this

@inproceedings{5d019743010346a3aaaf37059c57907b,

title = "Silane depletion measurements in an expanding thermal plasma",

author = "W.M.M. Kessels and L. Gabella and J. Bastiaanssen and R.J. Severens and {Sanden, van de}, M.C.M. and D.C. Schram",

year = "1997",

language = "English",

pages = "159--162",

booktitle = "Proceedings Frontiers in Low Temperature Plasma Diagnostics II, Bad Honnef",

publisher = "Arbeitsgemeinschaft Plasmaphysik",

}

Silane depletion measurements in an expanding thermal plasma. / Kessels, W.M.M.; Gabella, L.; Bastiaanssen, J. et al.
Proceedings Frontiers in Low Temperature Plasma Diagnostics II, Bad Honnef. Bad Honnef: Arbeitsgemeinschaft Plasmaphysik, 1997. p. 159-162.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Silane depletion measurements in an expanding thermal plasma

AU - Kessels, W.M.M.

AU - Gabella, L.

AU - Bastiaanssen, J.

AU - Severens, R.J.

AU - Sanden, van de, M.C.M.

AU - Schram, D.C.

PY - 1997

Y1 - 1997

M3 - Conference contribution

SP - 159

EP - 162

BT - Proceedings Frontiers in Low Temperature Plasma Diagnostics II, Bad Honnef

PB - Arbeitsgemeinschaft Plasmaphysik

CY - Bad Honnef

ER -