Silane depletion measurements in an expanding thermal plasma

W.M.M. Kessels, L. Gabella, J. Bastiaanssen, R.J. Severens, M.C.M. Sanden, van de, D.C. Schram

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Original languageEnglish
Title of host publicationProceedings Frontiers in Low Temperature Plasma Diagnostics II, Bad Honnef
Place of PublicationBad Honnef
PublisherArbeitsgemeinschaft Plasmaphysik
Pages159-162
Publication statusPublished - 1997

Cite this

Kessels, W. M. M., Gabella, L., Bastiaanssen, J., Severens, R. J., Sanden, van de, M. C. M., & Schram, D. C. (1997). Silane depletion measurements in an expanding thermal plasma. In Proceedings Frontiers in Low Temperature Plasma Diagnostics II, Bad Honnef (pp. 159-162). Arbeitsgemeinschaft Plasmaphysik.