SiH3 density measurements in a remote SiH4 plasma

Research output: Contribution to conferencePosterAcademic

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Abstract

Abstract only.
Original languageEnglish
Pages25-
Publication statusPublished - 1999
Event2nd Euregional Workshop on the Exploration of Low Temperature Plasma Physics (WELTPP-2), December 2-3, 1999, Kerkrade, The Netherlands - Conference centre "Rolduc", Kerkrade, Netherlands
Duration: 2 Dec 19993 Dec 1999

Workshop

Workshop2nd Euregional Workshop on the Exploration of Low Temperature Plasma Physics (WELTPP-2), December 2-3, 1999, Kerkrade, The Netherlands
Abbreviated titleWELTPP-2
CountryNetherlands
CityKerkrade
Period2/12/993/12/99

Bibliographical note

Poster presented at the 2nd Euregional WELT-PP Workshop on the Exploration of Low Temperature Plasma Physics, December 2-3, 1999, Rolduc, Kerkrade, The Netherlands

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