Side-wall morphology in reactive ion etching of GaN

F. Karouta, B. Jacobs, K. Jacobs, I. Moerman

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Original languageEnglish
Title of host publicationProc. 4th Annual Sympsoium of the IEEE/LEOS Benelux Chapter
Pages215-217
Publication statusPublished - 1999
Event4th Annual Symposium of the IEEE/LEOS Benelux Chapter, 1999 - Mons, Belgium
Duration: 15 Nov 199915 Nov 1999

Conference

Conference4th Annual Symposium of the IEEE/LEOS Benelux Chapter, 1999
CountryBelgium
CityMons
Period15/11/9915/11/99

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