Shining a light on silicon etching

A.A.E. Stevens

Research output: ThesisPhd Thesis 1 (Research TU/e / Graduation TU/e)

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Original languageEnglish
QualificationDoctor of Philosophy
Awarding Institution
  • Applied Physics and Science Education
Supervisors/Advisors
  • Beijerinck, Herman, Promotor
  • van de Sanden, M.C.M. (Richard), Promotor
  • Kessels, W.M.M. (Erwin), Copromotor
Award date29 Jun 2006
Place of PublicationEindhoven
Publisher
Print ISBNs978-90-386-2491-4
DOIs
Publication statusPublished - 2006

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