Shining a light on silicon etching

A.A.E. Stevens

Research output: Thesis › Phd Thesis 1 (Research TU/e / Graduation TU/e)

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Original language	English
Qualification	Doctor of Philosophy
Awarding Institution	Applied Physics and Science Education
Supervisors/Advisors	Beijerinck, Herman, Promotor van de Sanden, M.C.M. (Richard), Promotor Kessels, W.M.M. (Erwin), Copromotor
Award date	29 Jun 2006
Place of Publication	Eindhoven
Publisher	Technische Universiteit Eindhoven
Print ISBNs	978-90-386-2491-4
DOIs	https://doi.org/10.6100/IR609424
Publication status	Published - 2006

Access to Document

@phdthesis{c3120726203144c1b6d7384a619b7c1a,

title = "Shining a light on silicon etching",

author = "A.A.E. Stevens",

year = "2006",

doi = "10.6100/IR609424",

language = "English",

isbn = "978-90-386-2491-4",

publisher = "Technische Universiteit Eindhoven",

type = "Phd Thesis 1 (Research TU/e / Graduation TU/e)",

school = "Applied Physics and Science Education",

}