@inproceedings{ffa7443b205e4afa99b4e35d062f2cea,
title = "Setup of a confocal nanoscope in reflection using a super-oscillatory lens",
abstract = "In this paper, we discuss the setup of a confocal nanoscope in reflection using a super-oscillatory lens (SOL)which offers a sub-diffracted focal spot with an ultra-short depth of focus (≈100 nm). A tolerance of 20 nm defocussing in a 10 μm travel range is thus necessary, translating to an alignment requirement of the stage, with respect to the optical axis, below 2 mrad. We discuss an iterative procedure to fine tune the stage movement to achieve this requirement. We also demonstrate the necessity of the alignment by imaging a 5μm long 1D array of rectangular shaped Au nanostructures with a periodicity of 500 nm",
keywords = "Super-oscillatory lens, nano-positioning, reection nanoscopy, reflection nanoscopy",
author = "Arvind Nagarajan and Marijn Siemons and Pjotr Stoevelaar and F. Silvestri and Achanta, {Venu Gopal} and B{\"a}umer, {Stefan M.B.} and Giampiero Gerini",
year = "2019",
month = sep,
day = "3",
doi = "10.1117/12.2528717",
language = "English",
isbn = "9781510628717",
series = "Proceedings of SPIE",
publisher = "SPIE",
editor = "Balaji Panchapakesan and Andr{\'e}-Jean Attias",
booktitle = "Nanoengineering",
address = "United States",
note = "SPIE Nanoscience + Engineering ; Conference date: 11-08-2019 Through 15-08-2019",
}