Semiconductor Surface Passivation: Nanolayer Stacks by Atomic Scale Processing

Research output: Thesis › Phd Thesis 1 (Research TU/e / Graduation TU/e)

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Original language	English
Qualification	Doctor of Philosophy
Awarding Institution	Applied Physics and Science Education
Supervisors/Advisors	Kessels, W.M.M. (Erwin), Promotor Macco, Bart, Copromotor
Award date	17 Nov 2023
Place of Publication	Eindhoven
Publisher	Eindhoven University of Technology
Print ISBNs	978-90-386-5857-5
Publication status	Published - 17 Nov 2023

Proefschrift.

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@phdthesis{80097fd70c23467f9a9fd12e7aba0495,

title = "Semiconductor Surface Passivation: Nanolayer Stacks by Atomic Scale Processing",

author = "Theeuwes, \{Roel Joris\}",

note = "Proefschrift.",

year = "2023",

month = nov,

day = "17",

language = "English",

isbn = "978-90-386-5857-5",

publisher = "Eindhoven University of Technology",

type = "Phd Thesis 1 (Research TU/e / Graduation TU/e)",

school = "Applied Physics and Science Education",

}