Semiconductor-Core Metal

C.Z. Ning, M.T. Hill, M.J.H. Marell, E.S.P. Leong, E. Smalbrugge, Y. Zhu, Minghua Sun, P.J. Veldhoven, van, E.J. Geluk, F. Karouta, Y.S. Oei, H. Wang, K. Ding, R. Liu, R. Nötzel, M.K. Smit

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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No abstract.
Original languageEnglish
Title of host publicationAtomic layer deposition applications 5 : Proceedings of the 216th ECS meeting, 4 - 9 October 2009, Vienna, Austria
EditorsS. Bent, S. De Gendt
Place of PublicationPennington, NJ
PublisherElectrochemical Society, Inc.
Pages2292-(E8) S2
ISBN (Print)978-1-566-77741-4
Publication statusPublished - 2009
Event216th Electrochemical Society Meeting (ECS 2009) - Vienna, Austria
Duration: 4 Oct 20099 Oct 2009
Conference number: 216


Conference216th Electrochemical Society Meeting (ECS 2009)
Abbreviated titleECS 2009)
Internet address


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