Semi-analytic approximation of moving heat load response applied to wafer scanners

D.W.M. Veldman, R.H.B. Fey, H.J Zwart, M.M.J. van de Wal, J.D.B.J. van den Boom, H. Nijmeijer

Research output: Contribution to conferencePosterAcademic

29 Downloads (Pure)
Original languageEnglish
Publication statusPublished - 2017
Event20th Engineering Mechanics Symposium (EM 2017) - Hotel Papendal, Arnhem, Netherlands
Duration: 23 Oct 201725 Oct 2017
http://www.em.tue.nl/events/index.php/3

Conference

Conference20th Engineering Mechanics Symposium (EM 2017)
Abbreviated titleEM 2017
CountryNetherlands
CityArnhem
Period23/10/1725/10/17
Internet address

Cite this

Veldman, D. W. M., Fey, R. H. B., Zwart, H. J., van de Wal, M. M. J., van den Boom, J. D. B. J., & Nijmeijer, H. (2017). Semi-analytic approximation of moving heat load response applied to wafer scanners. Poster session presented at 20th Engineering Mechanics Symposium (EM 2017), Arnhem, Netherlands.