Semi-analytic approximation of moving heat load response applied to wafer scanners

D.W.M. Veldman, R.H.B. Fey, H.J Zwart, M.M.J. van de Wal, J.D.B.J. van den Boom, H. Nijmeijer

Research output: Contribution to conferencePosterAcademic

Conference

Conference20th Engineering Mechanics Symposium (EM 2017)
Abbreviated titleEM 2017
CountryNetherlands
CityArnhem
Period23/10/1725/10/17
Internet address

Cite this

Veldman, D. W. M., Fey, R. H. B., Zwart, H. J., van de Wal, M. M. J., van den Boom, J. D. B. J., & Nijmeijer, H. (2017). Semi-analytic approximation of moving heat load response applied to wafer scanners. Poster session presented at 20th Engineering Mechanics Symposium (EM 2017), Arnhem, Netherlands.
Veldman, D.W.M. ; Fey, R.H.B. ; Zwart, H.J ; van de Wal, M.M.J. ; van den Boom, J.D.B.J. ; Nijmeijer, H./ Semi-analytic approximation of moving heat load response applied to wafer scanners. Poster session presented at 20th Engineering Mechanics Symposium (EM 2017), Arnhem, Netherlands.
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title = "Semi-analytic approximation of moving heat load response applied to wafer scanners",
author = "D.W.M. Veldman and R.H.B. Fey and H.J Zwart and {van de Wal}, M.M.J. and {van den Boom}, J.D.B.J. and H. Nijmeijer",
year = "2017",
language = "English",
note = "20th Engineering Mechanics Symposium (EM 2017), EM 2017 ; Conference date: 23-10-2017 Through 25-10-2017",
url = "http://www.em.tue.nl/events/index.php/3",

}

Veldman, DWM, Fey, RHB, Zwart, HJ, van de Wal, MMJ, van den Boom, JDBJ & Nijmeijer, H 2017, 'Semi-analytic approximation of moving heat load response applied to wafer scanners' 20th Engineering Mechanics Symposium (EM 2017), Arnhem, Netherlands, 23/10/17 - 25/10/17, .

Semi-analytic approximation of moving heat load response applied to wafer scanners. / Veldman, D.W.M.; Fey, R.H.B.; Zwart, H.J; van de Wal, M.M.J.; van den Boom, J.D.B.J.; Nijmeijer, H.

2017. Poster session presented at 20th Engineering Mechanics Symposium (EM 2017), Arnhem, Netherlands.

Research output: Contribution to conferencePosterAcademic

TY - CONF

T1 - Semi-analytic approximation of moving heat load response applied to wafer scanners

AU - Veldman,D.W.M.

AU - Fey,R.H.B.

AU - Zwart,H.J

AU - van de Wal,M.M.J.

AU - van den Boom,J.D.B.J.

AU - Nijmeijer,H.

PY - 2017

Y1 - 2017

M3 - Poster

ER -

Veldman DWM, Fey RHB, Zwart HJ, van de Wal MMJ, van den Boom JDBJ, Nijmeijer H. Semi-analytic approximation of moving heat load response applied to wafer scanners. 2017. Poster session presented at 20th Engineering Mechanics Symposium (EM 2017), Arnhem, Netherlands.