Semi-analytic approximation of moving heat load response applied to wafer scanners

D.W.M. Veldman, R.H.B. Fey, H.J Zwart, M.M.J. van de Wal, J.D.B.J. van den Boom, H. Nijmeijer

Research output: Contribution to conferencePoster

31 Downloads (Pure)
Original languageEnglish
Publication statusPublished - 2017
Event20th Engineering Mechanics Symposium (EM 2017) - Hotel Papendal, Arnhem, Netherlands
Duration: 23 Oct 201725 Oct 2017
http://www.em.tue.nl/events/index.php/3

Conference

Conference20th Engineering Mechanics Symposium (EM 2017)
Abbreviated titleEM 2017
CountryNetherlands
CityArnhem
Period23/10/1725/10/17
Internet address

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