Selective atomic layer deposition and etching of oxides

A. Mameli

Research output: ThesisPhd Thesis 1 (Research TU/e / Graduation TU/e)

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Original languageEnglish
QualificationDoctor of Philosophy
Awarding Institution
  • Department of Applied Physics
Supervisors/Advisors
  • Roozeboom, Fred, Promotor
  • Kessels, W.M.M. (Erwin), Promotor
  • Mackus, Adrie, Copromotor
Award date5 Jul 2018
Place of PublicationEindhoven
Publisher
Print ISBNs978-90-386-4531-5
Publication statusPublished - 5 Jul 2018

Bibliographical note

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Mameli, A. (2018). Selective atomic layer deposition and etching of oxides. Eindhoven: Technische Universiteit Eindhoven.