Selective atomic layer deposition and etching of oxides

A. Mameli

Research output: ThesisPhd Thesis 1 (Research TU/e / Graduation TU/e)

4306 Downloads (Pure)
Original languageEnglish
QualificationDoctor of Philosophy
Awarding Institution
  • Applied Physics and Science Education
  • Roozeboom, F., Promotor
  • Kessels, W.M.M. (Erwin), Promotor
  • Mackus, Adrie J.M., Copromotor
Award date5 Jul 2018
Place of PublicationEindhoven
Print ISBNs978-90-386-4531-5
Publication statusPublished - 5 Jul 2018

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