Selective atomic layer deposition and etching of oxides

A. Mameli

Research output: Thesis › Phd Thesis 1 (Research TU/e / Graduation TU/e)

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Original language	English
Qualification	Doctor of Philosophy
Awarding Institution	Applied Physics and Science Education
Supervisors/Advisors	Roozeboom, F., Promotor Kessels, W.M.M. (Erwin), Promotor Mackus, Adrie J.M., Copromotor
Award date	5 Jul 2018
Place of Publication	Eindhoven
Publisher	Technische Universiteit Eindhoven
Print ISBNs	978-90-386-4531-5
Publication status	Published - 5 Jul 2018

Proefschrift

Access to Document

@phdthesis{82471630353f4978978072ba5a9e0f9c,

title = "Selective atomic layer deposition and etching of oxides",

author = "A. Mameli",

note = "Proefschrift",

year = "2018",

month = jul,

day = "5",

language = "English",

isbn = "978-90-386-4531-5",

publisher = "Technische Universiteit Eindhoven",

type = "Phd Thesis 1 (Research TU/e / Graduation TU/e)",

school = "Applied Physics and Science Education",

}