Scalable reticle heating correction design

J. Wang

Scalable reticle heating correction design

J. Wang

Research output: Thesis › EngD Thesis

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Abstract

With the increasing complexity of ASML machines, the Metrology department has developed many measurement and correction mechanisms for improving the exposure accuracy. One of such mechanisms is reticle heating correction. This project provided design and implementation for reticle heating correction by following the 4+1 view model. As a result, a software framework was delivered, including the data model of reticle heating correction. With this software framework, reticle heating correction can be easily extended, for example by adding and removing reticle heating correction models. In addition, it demonstrated that the software framework does not introduce negative overlay impact.

Original language	English
Supervisors/Advisors	Schmaltz, J., Supervisor Vazifehdan, Javad, External supervisor, External person Jansen, Marten, External supervisor, External person Shumiacher, S., External supervisor, External person
Award date	28 Sept 2017
Place of Publication	Eindhoven
Publisher	Technische Universiteit Eindhoven
Publication status	Published - 28 Sept 2017

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PdEng thesis. - Confidential until 30-9-2019

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2019-09-30_ST_Wang_JFinal published version, 1.14 MB

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@phdthesis{9dc35beb4b734baf9239faaffedb8aa6,

title = "Scalable reticle heating correction design",

abstract = "With the increasing complexity of ASML machines, the Metrology department has developed many measurement and correction mechanisms for improving the exposure accuracy. One of such mechanisms is reticle heating correction. This project provided design and implementation for reticle heating correction by following the 4+1 view model. As a result, a software framework was delivered, including the data model of reticle heating correction. With this software framework, reticle heating correction can be easily extended, for example by adding and removing reticle heating correction models. In addition, it demonstrated that the software framework does not introduce negative overlay impact.",

author = "J. Wang",

note = "PdEng thesis. - Confidential until 30-9-2019",

year = "2017",

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day = "28",

language = "English",

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publisher = "Technische Universiteit Eindhoven",

type = "EngD Thesis",

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TY - THES

T1 - Scalable reticle heating correction design

AU - Wang, J.

N1 - PdEng thesis. - Confidential until 30-9-2019

PY - 2017/9/28

Y1 - 2017/9/28

N2 - With the increasing complexity of ASML machines, the Metrology department has developed many measurement and correction mechanisms for improving the exposure accuracy. One of such mechanisms is reticle heating correction. This project provided design and implementation for reticle heating correction by following the 4+1 view model. As a result, a software framework was delivered, including the data model of reticle heating correction. With this software framework, reticle heating correction can be easily extended, for example by adding and removing reticle heating correction models. In addition, it demonstrated that the software framework does not introduce negative overlay impact.

AB - With the increasing complexity of ASML machines, the Metrology department has developed many measurement and correction mechanisms for improving the exposure accuracy. One of such mechanisms is reticle heating correction. This project provided design and implementation for reticle heating correction by following the 4+1 view model. As a result, a software framework was delivered, including the data model of reticle heating correction. With this software framework, reticle heating correction can be easily extended, for example by adding and removing reticle heating correction models. In addition, it demonstrated that the software framework does not introduce negative overlay impact.

M3 - EngD Thesis

T3 - PDEng rapport

PB - Technische Universiteit Eindhoven

CY - Eindhoven

ER -

Scalable reticle heating correction design

Abstract

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