Rotation of particles trapped in the sheath of a radio-frequency capacitively coupled plasma

G.V. Paeva, R P Dahiya, G.M.W. Kroesen, W.W. Stoffels

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Abstract

We report experiments on orbiting of particles in the plasma sheath in a horizontal plane under a monolayer of spherical particles with diameter of 9.8 mum. The motion is performed by heavier particles, which we assume to be agglomerates of the injected spherical particles. These particles are nonspherical. The dependence of the rotation on the plasma parameters (pressure, power) is analyzed and some properties of the driving force necessary for this phenomenon are discussed.
Original languageEnglish
Pages (from-to)601-606
JournalIEEE Transactions on Plasma Science
Volume32
Issue number2
DOIs
Publication statusPublished - 2004

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