Role of temperature and gas-chemistry in micro-masking on InP by ICP etching

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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Original language	English
Title of host publication	IEEE LEOS Annual Meeting (ThDD2), Sydney, Australia
Publisher	Institute of Electrical and Electronics Engineers
Pages	987-988
Publication status	Published - 2005
Event	18th Annual Meeting of the IEEE Lasers and Electro-Optics Society (LEOS 2005) - Sydney, Australia Duration: 22 Oct 2005 → 28 Oct 2005 Conference number: 18

Conference	18th Annual Meeting of the IEEE Lasers and Electro-Optics Society (LEOS 2005)
Abbreviated title	LEOS 2005
Country/Territory	Australia
City	Sydney
Period	22/10/05 → 28/10/05

Cite this

@inproceedings{b71b9b739b8c432a9d91188c9baa53d9,

title = "Role of temperature and gas-chemistry in micro-masking on InP by ICP etching",

author = "F. Karouta and B. Docter and E.J. Geluk and \{Sander - Jochem\}, M.J.H. and \{Tol, van der\}, J.J.G.M. and M.K. Smit",

year = "2005",

language = "English",

pages = "987--988",

booktitle = "IEEE LEOS Annual Meeting (ThDD2), Sydney, Australia",

publisher = "Institute of Electrical and Electronics Engineers",

address = "United States",

note = "18th Annual Meeting of the IEEE Lasers and Electro-Optics Society (LEOS 2005), LEOS 2005 ; Conference date: 22-10-2005 Through 28-10-2005",

}

Karouta, F, Docter, B, Geluk, EJ, Sander - Jochem, MJH, Tol, van der, JJGM & Smit, MK 2005, Role of temperature and gas-chemistry in micro-masking on InP by ICP etching. in IEEE LEOS Annual Meeting (ThDD2), Sydney, Australia. Institute of Electrical and Electronics Engineers, pp. 987-988, 18th Annual Meeting of the IEEE Lasers and Electro-Optics Society (LEOS 2005), Sydney, Australia, 22/10/05.

TY - GEN

T1 - Role of temperature and gas-chemistry in micro-masking on InP by ICP etching

AU - Karouta, F.

AU - Docter, B.

AU - Geluk, E.J.

AU - Sander - Jochem, M.J.H.

AU - Tol, van der, J.J.G.M.

AU - Smit, M.K.

N1 - Conference code: 18

PY - 2005

Y1 - 2005

M3 - Conference contribution

SP - 987

EP - 988

BT - IEEE LEOS Annual Meeting (ThDD2), Sydney, Australia

PB - Institute of Electrical and Electronics Engineers

T2 - 18th Annual Meeting of the IEEE Lasers and Electro-Optics Society (LEOS 2005)

Y2 - 22 October 2005 through 28 October 2005

ER -