Robust high aspect ratio semiconductor device

F. Roozeboom (Inventor), M. Goossens (Inventor), W.F.A. Besling (Inventor), N.A.M. Verhaegh (Inventor)

    Research output: PatentPatent publication

    49 Downloads (Pure)


    The invention relates to an semiconductor device comprising a first surface and neighboring first and second electric elements arranged on the first surface, in which each of the first and second elements extends from the first surface in a first direction, the first element having a cross section substantially perpendicular to the first direction and a sidewall surface extending at least partially in the first direction, wherein the sidewall surface comprises a first section and a second section adjoining the first section along a line extending substantially parallel to the first direction, wherein the first and second sections are placed at an angle with respect to each other for providing an inner corner wherein the sidewall surface at the inner corner is, at least partially, arranged at a constant distance R from a facing part of the second element for providing a mechanical reinforcement structure at the inner corner.
    Original languageEnglish
    Patent numberWO2010038174
    Publication statusPublished - 8 Apr 2010


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