Robust-control-relevant experiment design and system identification applied to a wafer stage

Nic Dirkx; Tom Oomen

Robust-control-relevant experiment design and system identification applied to a wafer stage

Nic Dirkx
, Tom Oomen

Research output: Contribution to conference › Poster

61 Downloads (Pure)

Original language	English
Number of pages	1
Publication status	Published - 2021
Event	29th Workshop of the European Research Network on System Identification, ERNSI 2021 - Rennes, France Duration: 26 Sept 2021 → 29 Sept 2021 Conference number: 29

Conference

Conference	29th Workshop of the European Research Network on System Identification, ERNSI 2021
Abbreviated title	ERNSI 2021
Country/Territory	France
City	Rennes
Period	26/09/21 → 29/09/21

Access to Document

DirkxOom2021bFinal author version , 17.4 MB

Cite this

@conference{deeb21d1b9b54726842ccafff2ccbfa7,

title = "Robust-control-relevant experiment design and system identification applied to a wafer stage",

author = "Nic Dirkx and Tom Oomen",

year = "2021",

language = "English",

note = "29th Workshop of the European Research Network on System Identification, ERNSI 2021, ERNSI 2021 ; Conference date: 26-09-2021 Through 29-09-2021",

}