Robust-Control-Relevant Coprime Factor Identification with Application to Model Validation of a Wafer Stage

T.A.E. Oomen, R.M.A. Herpen, van, O.H. Bosgra

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

10 Citations (Scopus)

Abstract

The performance of robust controllers depends on the set of candidate plants, but at present this intimate connection is untransparent. The aim of this paper is to construct a model set to improve the performance in a subsequent robust control design. Analysis of uncertainty structures reveals that there is an unexploited freedom in the realization of coprimefactorizations in the dual-Youla uncertainty structure. The main result of this paper is aspecific coprime factorization that results in model sets that are tuned for robust control. Thepresented coprime factorization can be identified directly from data. Application of the proposedmethodology to an industrial wafer stage reveals improved model validation results.
Original languageEnglish
Title of host publicationProceedings of the 15th IFAC Symposium on System Identification (SYSID 2009) 6-8 July 2009, Saint-Malo, France
EditorsE. Walter
Place of PublicationSaint Malo, France
PublisherIFAC
Pages1044-1049
ISBN (Print)978-3-902661-47-0
DOIs
Publication statusPublished - 2009

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    Oomen, T. A. E., Herpen, van, R. M. A., & Bosgra, O. H. (2009). Robust-Control-Relevant Coprime Factor Identification with Application to Model Validation of a Wafer Stage. In E. Walter (Ed.), Proceedings of the 15th IFAC Symposium on System Identification (SYSID 2009) 6-8 July 2009, Saint-Malo, France (pp. 1044-1049). IFAC. https://doi.org/10.3182/20090706-3-FR-2004.0043