Robust control and data-driven tuning of a hybrid integrator-gain system with applications to wafer scanners

Engineering

• Closed Loop 100%
• System Gain 100%
• Frequency Domain 50%
• Linear Time Invariant 50%
• Controller Parameter 50%
• Time Domain 50%
• System State 50%
• Problem Formulation 50%
• Gauss 50%
• Frequency Response Function 50%
• Optimization Approach 50%
• Filter Design 50%
• Loop Frequency Response 50%
• Loop Stability 50%
• Settling Time 50%
• System Element 50%
• Frequency Response 50%