Robust Beyond-Rigid-Body Control of Next Generation Wafer Stages

R.M.A. Herpen, van, T.A.E. Oomen, M.M.J. Wal, van de, O.H. Bosgra

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Original languageEnglish
Title of host publicationProceedings of the 28th Benelux Meeting on Systems and Control, March 16-18, 2009, Spa, Belgium
PublisherUniversité de Liège
Publication statusPublished - 2009

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