Robust Beyond-Rigid-Body Control of Next Generation Wafer Stages

R.M.A. Herpen, van, T.A.E. Oomen, M.M.J. Wal, van de, O.H. Bosgra

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

Original language	English
Title of host publication	Proceedings of the 28th Benelux Meeting on Systems and Control, March 16-18, 2009, Spa, Belgium
Publisher	Université de Liège
Publication status	Published - 2009

Cite this

@inproceedings{ae1214c905c14c0695140ca3f31936f7,

title = "Robust Beyond-Rigid-Body Control of Next Generation Wafer Stages",

author = "{Herpen, van}, R.M.A. and T.A.E. Oomen and {Wal, van de}, M.M.J. and O.H. Bosgra",

year = "2009",

language = "English",

booktitle = "Proceedings of the 28th Benelux Meeting on Systems and Control, March 16-18, 2009, Spa, Belgium",

publisher = "Universit{\'e} de Li{\`e}ge",

}