Reticle side wall clamping

G.P. Naaijkens

Research output: Thesis › Phd Thesis 1 (Research TU/e / Graduation TU/e)

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Original language	English
Qualification	Doctor of Philosophy
Awarding Institution	Mechanical Engineering
Supervisors/Advisors	Steinbuch, Maarten, Promotor Rosielle, Nick, Copromotor
Award date	13 Jun 2013
Place of Publication	Eindhoven
Publisher	Technische Universiteit Eindhoven
Print ISBNs	978-90-8891-636-6
DOIs	https://doi.org/10.6100/IR756525
Publication status	Published - 2013

Access to Document

@phdthesis{c911ff69c2bb4b22a3596e4566bee8f6,

title = "Reticle side wall clamping",

author = "G.P. Naaijkens",

year = "2013",

doi = "10.6100/IR756525",

language = "English",

isbn = "978-90-8891-636-6",

publisher = "Technische Universiteit Eindhoven",

type = "Phd Thesis 1 (Research TU/e / Graduation TU/e)",

school = "Mechanical Engineering",

}