Resistless patterning of magnetic storage media using ion projection structuring

A.H. Dietzel; R. Berger; H. Grimm; C. Schug; W.H. Bruenger; C. Dzionk; F. Letzkus; R. Springer; H. Loeschner; E. Platzgummer; G. Stengl; S. Anders; Z. Bandic; C.T. Rettner; B.D. Terris; H. Eichhorn; M. Boehm; D. Adam

doi:10.1557/PROC-705-Y3.4

Resistless patterning of magnetic storage media using ion projection structuring

A.H. Dietzel
, R. Berger
, H. Grimm
, C. Schug
, W.H. Bruenger
, C. Dzionk
, F. Letzkus
, R. Springer
, H. Loeschner
, E. Platzgummer
, G. Stengl
, S. Anders
, Z. Bandic
, C.T. Rettner
, B.D. Terris
, H. Eichhorn
, M. Boehm
, D. Adam

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	English
Title of host publication	Nanopatterning : from ultralarge-scale integration to biotechnology : symposium held November 25-29, 2001, Boston, Massachusetts, U.S.A.
Editors	L. Merhari, K.E. Gonsalves, E.A. Dobisz
Place of Publication	Warrendale
Publisher	Materials Research Society
Pages	279-289
Number of pages	11
ISBN (Print)	1-55899-641-9
DOIs	https://doi.org/10.1557/PROC-705-Y3.4
Publication status	Published - 2002
Externally published	Yes

Publication series

Name	Materials Research Society Symposium Proceedings
Publisher	Materials Research Society
Volume	705
ISSN (Print)	0272-9172

Access to Document

10.1557/PROC-705-Y3.4

Cite this

Dietzel, A. H., Berger, R., Grimm, H., Schug, C., Bruenger, W. H., Dzionk, C., Letzkus, F., Springer, R., Loeschner, H., Platzgummer, E., Stengl, G., Anders, S., Bandic, Z., Rettner, C. T., Terris, B. D., Eichhorn, H., Boehm, M., & Adam, D. (2002). Resistless patterning of magnetic storage media using ion projection structuring. In L. Merhari, K. E. Gonsalves, & E. A. Dobisz (Eds.), Nanopatterning : from ultralarge-scale integration to biotechnology : symposium held November 25-29, 2001, Boston, Massachusetts, U.S.A. (pp. 279-289). (Materials Research Society Symposium Proceedings; Vol. 705). Materials Research Society. https://doi.org/10.1557/PROC-705-Y3.4

Dietzel, A.H. ; Berger, R. ; Grimm, H. et al. / Resistless patterning of magnetic storage media using ion projection structuring. Nanopatterning : from ultralarge-scale integration to biotechnology : symposium held November 25-29, 2001, Boston, Massachusetts, U.S.A.. editor / L. Merhari ; K.E. Gonsalves ; E.A. Dobisz. Warrendale : Materials Research Society, 2002. pp. 279-289 (Materials Research Society Symposium Proceedings).

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title = "Resistless patterning of magnetic storage media using ion projection structuring",

author = "A.H. Dietzel and R. Berger and H. Grimm and C. Schug and W.H. Bruenger and C. Dzionk and F. Letzkus and R. Springer and H. Loeschner and E. Platzgummer and G. Stengl and S. Anders and Z. Bandic and C.T. Rettner and B.D. Terris and H. Eichhorn and M. Boehm and D. Adam",

year = "2002",

doi = "10.1557/PROC-705-Y3.4",

language = "English",

isbn = "1-55899-641-9",

series = "Materials Research Society Symposium Proceedings",

publisher = "Materials Research Society",

pages = "279--289",

editor = "L. Merhari and K.E. Gonsalves and E.A. Dobisz",

booktitle = "Nanopatterning : from ultralarge-scale integration to biotechnology : symposium held November 25-29, 2001, Boston, Massachusetts, U.S.A.",

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Dietzel, AH, Berger, R, Grimm, H, Schug, C, Bruenger, WH, Dzionk, C, Letzkus, F, Springer, R, Loeschner, H, Platzgummer, E, Stengl, G, Anders, S, Bandic, Z, Rettner, CT, Terris, BD, Eichhorn, H, Boehm, M & Adam, D 2002, Resistless patterning of magnetic storage media using ion projection structuring. in L Merhari, KE Gonsalves & EA Dobisz (eds), Nanopatterning : from ultralarge-scale integration to biotechnology : symposium held November 25-29, 2001, Boston, Massachusetts, U.S.A.. Materials Research Society Symposium Proceedings, vol. 705, Materials Research Society, Warrendale, pp. 279-289. https://doi.org/10.1557/PROC-705-Y3.4

Resistless patterning of magnetic storage media using ion projection structuring. / Dietzel, A.H.; Berger, R.; Grimm, H. et al.
Nanopatterning : from ultralarge-scale integration to biotechnology : symposium held November 25-29, 2001, Boston, Massachusetts, U.S.A.. ed. / L. Merhari; K.E. Gonsalves; E.A. Dobisz. Warrendale: Materials Research Society, 2002. p. 279-289 (Materials Research Society Symposium Proceedings; Vol. 705).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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T1 - Resistless patterning of magnetic storage media using ion projection structuring

AU - Dietzel, A.H.

AU - Berger, R.

AU - Grimm, H.

AU - Schug, C.

AU - Bruenger, W.H.

AU - Dzionk, C.

AU - Letzkus, F.

AU - Springer, R.

AU - Loeschner, H.

AU - Platzgummer, E.

AU - Stengl, G.

AU - Anders, S.

AU - Bandic, Z.

AU - Rettner, C.T.

AU - Terris, B.D.

AU - Eichhorn, H.

AU - Boehm, M.

AU - Adam, D.

PY - 2002

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DO - 10.1557/PROC-705-Y3.4

M3 - Conference contribution

SN - 1-55899-641-9

T3 - Materials Research Society Symposium Proceedings

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EP - 289

BT - Nanopatterning : from ultralarge-scale integration to biotechnology : symposium held November 25-29, 2001, Boston, Massachusetts, U.S.A.

A2 - Merhari, L.

A2 - Gonsalves, K.E.

A2 - Dobisz, E.A.

PB - Materials Research Society

CY - Warrendale

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Dietzel AH, Berger R, Grimm H, Schug C, Bruenger WH, Dzionk C et al. Resistless patterning of magnetic storage media using ion projection structuring. In Merhari L, Gonsalves KE, Dobisz EA, editors, Nanopatterning : from ultralarge-scale integration to biotechnology : symposium held November 25-29, 2001, Boston, Massachusetts, U.S.A.. Warrendale: Materials Research Society. 2002. p. 279-289. (Materials Research Society Symposium Proceedings). doi: 10.1557/PROC-705-Y3.4