Resistless patterning of magnetic storage media using ion projection structuring

A.H. Dietzel, R. Berger, H. Grimm, C. Schug, W.H. Bruenger, C. Dzionk, F. Letzkus, R. Springer, H. Loeschner, E. Platzgummer, G. Stengl, S. Anders, Z. Bandic, C.T. Rettner, B.D. Terris, H. Eichhorn, M. Boehm, D. Adam

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

2 Citations (Scopus)
Original languageEnglish
Title of host publicationNanopatterning : from ultralarge-scale integration to biotechnology : symposium held November 25-29, 2001, Boston, Massachusetts, U.S.A.
EditorsL. Merhari, K.E. Gonsalves, E.A. Dobisz
Place of PublicationWarrendale
PublisherMaterials Research Society
Number of pages11
ISBN (Print)1-55899-641-9
Publication statusPublished - 2002
Externally publishedYes

Publication series

NameMaterials Research Society Symposium Proceedings
PublisherMaterials Research Society
ISSN (Print)0272-9172

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