Resistivity variations in ion implanted silicon detectors

H.A. Rijken; S.S. Klein; W.C.M. Ligthart; M. J.A. de Voigt; P. Burger

doi:10.1109/23.256578

Resistivity variations in ion implanted silicon detectors

H.A. Rijken, S.S. Klein, W.C.M. Ligthart, M. J.A. de Voigt, P. Burger

Research output: Contribution to journal › Article › Academic › peer-review

2 Citations (Scopus)

Abstract

Ion implanted silicon detectors which are specially developed for timing experiments show timing response variations of a few times 100 ps as a function of the position of irradiation. These variations are caused by resistivity variations of a few times 10%. To quantify these resistivity variations depletion depth studies have been performed for a set of detectors. Best timing results are obtained with a high resistivity overdepleted detector.

Original language	English
Pages (from-to)	349-353
Number of pages	5
Journal	IEEE Transactions on Nuclear Science
Volume	40
Issue number	4
DOIs	https://doi.org/10.1109/23.256578
Publication status	Published - Aug 1993

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title = "Resistivity variations in ion implanted silicon detectors",

abstract = "Ion implanted silicon detectors which are specially developed for timing experiments show timing response variations of a few times 100 ps as a function of the position of irradiation. These variations are caused by resistivity variations of a few times 10%. To quantify these resistivity variations depletion depth studies have been performed for a set of detectors. Best timing results are obtained with a high resistivity overdepleted detector.",

author = "H.A. Rijken and S.S. Klein and W.C.M. Ligthart and {de Voigt}, {M. J.A.} and P. Burger",

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AU - Burger, P.

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AB - Ion implanted silicon detectors which are specially developed for timing experiments show timing response variations of a few times 100 ps as a function of the position of irradiation. These variations are caused by resistivity variations of a few times 10%. To quantify these resistivity variations depletion depth studies have been performed for a set of detectors. Best timing results are obtained with a high resistivity overdepleted detector.

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