Research update : Atmospheric pressure spatial atomic layer deposition of ZnO thin films : reactors, doping and devices

R.L.Z. Hoye, D. Muñoz-Rojas, S.F. Nelson, A. Illiberi, P. Poodt, F. Roozeboom, J.L. MacManus-Driscoll

Research output: Contribution to journal › Article › Academic › peer-review

70 Citations (Scopus)
548 Downloads (Pure)

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