Remote silane plasma chemistry effects and their correlation with a-Si:H film properties

W.M.M. Kessels, A.H.M. Smets, B.A. Korevaar, G.J. Adriaenssens, M.C.M. Van De Sanden, D.C. Schram

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

15 Citations (Scopus)
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Engineering & Materials Science

Chemical Compounds

Physics & Astronomy