Remote plasma synthesis of silicon nanocrystals : plasma processes, nanocrystal growth, and diagnosis

Research output: Thesis › Phd Thesis 1 (Research TU/e / Graduation TU/e)

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Original language	English
Qualification	Doctor of Philosophy
Awarding Institution	Applied Physics and Science Education
Supervisors/Advisors	van de Sanden, M.C.M. (Richard), Promotor Kessels, W.M.M. (Erwin), Promotor
Award date	28 Jan 2014
Place of Publication	Eindhoven
Publisher	Technische Universiteit Eindhoven
Print ISBNs	978-90-386-3552-1
DOIs	https://doi.org/10.6100/IR765820
Publication status	Published - 2014

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@phdthesis{4e4ac622f8aa451383e8bdc922d1d88b,

title = "Remote plasma synthesis of silicon nanocrystals : plasma processes, nanocrystal growth, and diagnosis",

author = "I. Dogan",

year = "2014",

doi = "10.6100/IR765820",

language = "English",

isbn = "978-90-386-3552-1",

publisher = "Technische Universiteit Eindhoven",

type = "Phd Thesis 1 (Research TU/e / Graduation TU/e)",

school = "Applied Physics and Science Education",

}