Remote plasma synthesis of silicon nanocrystals : plasma processes, nanocrystal growth, and diagnosis

I. Dogan

Research output: ThesisPhd Thesis 1 (Research TU/e / Graduation TU/e)

318 Downloads (Pure)
Original languageEnglish
QualificationDoctor of Philosophy
Awarding Institution
  • Applied Physics
Supervisors/Advisors
  • van de Sanden, M.C.M. (Richard), Promotor
  • Kessels, W.M.M. (Erwin), Promotor
Award date28 Jan 2014
Place of PublicationEindhoven
Publisher
Print ISBNs978-90-386-3552-1
DOIs
Publication statusPublished - 2014

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