Remote plasma deposition of inorganic films : the influence of plasma chemistry and ion bombardment on film growth and moisture permeation barrier performances

M. Creatore; M.A. Blauw; J.L. Hemmen, van; I. Volintiru; M.M. Koetse; V.I.T.A. Lohmann; M.C.M. Sanden, van de; A. Milella; H.F.M. Schoo

Remote plasma deposition of inorganic films : the influence of plasma chemistry and ion bombardment on film growth and moisture permeation barrier performances

M. Creatore, M.A. Blauw, J.L. Hemmen, van, I. Volintiru, M.M. Koetse, V.I.T.A. Lohmann, M.C.M. Sanden, van de, A. Milella, H.F.M. Schoo

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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Original language	English
Title of host publication	Proceedings of the 10th International Conference on Plasma Surface Engineering : Conference and Exhibition (PSE 2006), September 10-15, 2006, Garmisch-Partenkirchen, Germany (Abstracts)
Place of Publication	S.l.
Publisher	s.n.
Pages	277-277
Publication status	Published - 2006
Event	conference; Conference and Exhibition (PSE 2006), September 10-15, 2006, Garmisch-Partenkirchen, Germany - Garmisch-Partenkirchen, Germany Duration: 10 Sept 2006 → 15 Sept 2006

Conference

Conference	conference; Conference and Exhibition (PSE 2006), September 10-15, 2006, Garmisch-Partenkirchen, Germany
Abbreviated title	PSE 2006
Country/Territory	Germany
City	Garmisch-Partenkirchen
Period	10/09/06 → 15/09/06
Other	10th International Conference on Plasma Surface Engineering

Cite this

Creatore, M., Blauw, M. A., Hemmen, van, J. L., Volintiru, I., Koetse, M. M., Lohmann, V. I. T. A., Sanden, van de, M. C. M., Milella, A., & Schoo, H. F. M. (2006). Remote plasma deposition of inorganic films : the influence of plasma chemistry and ion bombardment on film growth and moisture permeation barrier performances. In Proceedings of the 10th International Conference on Plasma Surface Engineering : Conference and Exhibition (PSE 2006), September 10-15, 2006, Garmisch-Partenkirchen, Germany (Abstracts) (pp. 277-277). s.n..

Creatore, M. ; Blauw, M.A. ; Hemmen, van, J.L. et al. / Remote plasma deposition of inorganic films : the influence of plasma chemistry and ion bombardment on film growth and moisture permeation barrier performances. Proceedings of the 10th International Conference on Plasma Surface Engineering : Conference and Exhibition (PSE 2006), September 10-15, 2006, Garmisch-Partenkirchen, Germany (Abstracts). S.l. : s.n., 2006. pp. 277-277

@inproceedings{c1243e54151b4c3cac4a2b263807355b,

title = "Remote plasma deposition of inorganic films : the influence of plasma chemistry and ion bombardment on film growth and moisture permeation barrier performances",

author = "M. Creatore and M.A. Blauw and {Hemmen, van}, J.L. and I. Volintiru and M.M. Koetse and V.I.T.A. Lohmann and {Sanden, van de}, M.C.M. and A. Milella and H.F.M. Schoo",

year = "2006",

language = "English",

pages = "277--277",

booktitle = "Proceedings of the 10th International Conference on Plasma Surface Engineering : Conference and Exhibition (PSE 2006), September 10-15, 2006, Garmisch-Partenkirchen, Germany (Abstracts)",

publisher = "s.n.",

note = "conference; Conference and Exhibition (PSE 2006), September 10-15, 2006, Garmisch-Partenkirchen, Germany, PSE 2006 ; Conference date: 10-09-2006 Through 15-09-2006",

}

Creatore, M, Blauw, MA, Hemmen, van, JL, Volintiru, I, Koetse, MM, Lohmann, VITA, Sanden, van de, MCM, Milella, A & Schoo, HFM 2006, Remote plasma deposition of inorganic films : the influence of plasma chemistry and ion bombardment on film growth and moisture permeation barrier performances. in Proceedings of the 10th International Conference on Plasma Surface Engineering : Conference and Exhibition (PSE 2006), September 10-15, 2006, Garmisch-Partenkirchen, Germany (Abstracts). s.n., S.l., pp. 277-277, conference; Conference and Exhibition (PSE 2006), September 10-15, 2006, Garmisch-Partenkirchen, Germany, Garmisch-Partenkirchen, Germany, 10/09/06.

Remote plasma deposition of inorganic films : the influence of plasma chemistry and ion bombardment on film growth and moisture permeation barrier performances. / Creatore, M.; Blauw, M.A.; Hemmen, van, J.L. et al.
Proceedings of the 10th International Conference on Plasma Surface Engineering : Conference and Exhibition (PSE 2006), September 10-15, 2006, Garmisch-Partenkirchen, Germany (Abstracts). S.l.: s.n., 2006. p. 277-277.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Remote plasma deposition of inorganic films : the influence of plasma chemistry and ion bombardment on film growth and moisture permeation barrier performances

AU - Creatore, M.

AU - Blauw, M.A.

AU - Hemmen, van, J.L.

AU - Volintiru, I.

AU - Koetse, M.M.

AU - Lohmann, V.I.T.A.

AU - Sanden, van de, M.C.M.

AU - Milella, A.

AU - Schoo, H.F.M.

PY - 2006

Y1 - 2006

M3 - Conference contribution

SP - 277

EP - 277

BT - Proceedings of the 10th International Conference on Plasma Surface Engineering : Conference and Exhibition (PSE 2006), September 10-15, 2006, Garmisch-Partenkirchen, Germany (Abstracts)

PB - s.n.

CY - S.l.

T2 - conference; Conference and Exhibition (PSE 2006), September 10-15, 2006, Garmisch-Partenkirchen, Germany

Y2 - 10 September 2006 through 15 September 2006

ER -

Creatore M, Blauw MA, Hemmen, van JL, Volintiru I, Koetse MM, Lohmann VITA et al. Remote plasma deposition of inorganic films : the influence of plasma chemistry and ion bombardment on film growth and moisture permeation barrier performances. In Proceedings of the 10th International Conference on Plasma Surface Engineering : Conference and Exhibition (PSE 2006), September 10-15, 2006, Garmisch-Partenkirchen, Germany (Abstracts). S.l.: s.n. 2006. p. 277-277