Original language | English |
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Qualification | Doctor of Philosophy |
Awarding Institution |
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Supervisors/Advisors |
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Award date | 13 Sep 2000 |
Place of Publication | Eindhoven |
Publisher | |
Print ISBNs | 90-386-1579-5 |
DOIs | |
Publication status | Published - 2000 |
Remote plasma deposition of hydrogenated amorphous silicon : plasma processes, film growth, and material properties
Research output: Thesis › Phd Thesis 1 (Research TU/e / Graduation TU/e)
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