Original language | English |
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Title of host publication | Proceedings of the 8th International Conference on Atomic Layer Deposition (ALD 2008), June 29 - July 2008, Bruges, Belgium (Book of Abstracts) |
Editors | W.M.M. Kessels, A. Delabie |
Place of Publication | S.n. |
Publisher | s.n. |
Pages | P-87- |
Publication status | Published - 2008 |
Remote plasma ALD of amorphous and anatase TiO2 studied by in-situ spectroscopic ellipsometry
W. Keuning, E. Langereis, J.L. Hemmen, van, O. Muraza, E. Rebrov, M.C.M. Sanden, van de, W.M.M. Kessels
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review
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