Remote plasma ALD of amorphous and anatase TiO2 studied by in-situ spectroscopic ellipsometry

W. Keuning; E. Langereis; J.L. Hemmen, van; O. Muraza; E. Rebrov; M.C.M. Sanden, van de; W.M.M. Kessels

Remote plasma ALD of amorphous and anatase TiO2 studied by in-situ spectroscopic ellipsometry

W. Keuning, E. Langereis, J.L. Hemmen, van, O. Muraza, E. Rebrov, M.C.M. Sanden, van de, W.M.M. Kessels

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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Original language	English
Title of host publication	Proceedings of the 8th International Conference on Atomic Layer Deposition (ALD 2008), June 29 - July 2008, Bruges, Belgium (Book of Abstracts)
Editors	W.M.M. Kessels, A. Delabie
Place of Publication	S.n.
Publisher	s.n.
Pages	P-87-
Publication status	Published - 2008

Cite this

Keuning, W., Langereis, E., Hemmen, van, J. L., Muraza, O., Rebrov, E., Sanden, van de, M. C. M., & Kessels, W. M. M. (2008). Remote plasma ALD of amorphous and anatase TiO2 studied by in-situ spectroscopic ellipsometry. In W. M. M. Kessels, & A. Delabie (Eds.), Proceedings of the 8th International Conference on Atomic Layer Deposition (ALD 2008), June 29 - July 2008, Bruges, Belgium (Book of Abstracts) (pp. P-87-). s.n..

Keuning, W. ; Langereis, E. ; Hemmen, van, J.L. ; Muraza, O. ; Rebrov, E. ; Sanden, van de, M.C.M. ; Kessels, W.M.M. / Remote plasma ALD of amorphous and anatase TiO2 studied by in-situ spectroscopic ellipsometry. Proceedings of the 8th International Conference on Atomic Layer Deposition (ALD 2008), June 29 - July 2008, Bruges, Belgium (Book of Abstracts). editor / W.M.M. Kessels ; A. Delabie. S.n. : s.n., 2008. pp. P-87-

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title = "Remote plasma ALD of amorphous and anatase TiO2 studied by in-situ spectroscopic ellipsometry",

author = "W. Keuning and E. Langereis and {Hemmen, van}, J.L. and O. Muraza and E. Rebrov and {Sanden, van de}, M.C.M. and W.M.M. Kessels",

year = "2008",

language = "English",

pages = "P--87--",

editor = "W.M.M. Kessels and A. Delabie",

booktitle = "Proceedings of the 8th International Conference on Atomic Layer Deposition (ALD 2008), June 29 - July 2008, Bruges, Belgium (Book of Abstracts)",

publisher = "s.n.",

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Keuning, W, Langereis, E, Hemmen, van, JL, Muraza, O, Rebrov, E , Sanden, van de, MCM & Kessels, WMM 2008, Remote plasma ALD of amorphous and anatase TiO2 studied by in-situ spectroscopic ellipsometry. in WMM Kessels & A Delabie (eds), Proceedings of the 8th International Conference on Atomic Layer Deposition (ALD 2008), June 29 - July 2008, Bruges, Belgium (Book of Abstracts). s.n., S.n., pp. P-87-.

Remote plasma ALD of amorphous and anatase TiO2 studied by in-situ spectroscopic ellipsometry. / Keuning, W.; Langereis, E.; Hemmen, van, J.L.; Muraza, O.; Rebrov, E.; Sanden, van de, M.C.M.; Kessels, W.M.M.

Proceedings of the 8th International Conference on Atomic Layer Deposition (ALD 2008), June 29 - July 2008, Bruges, Belgium (Book of Abstracts). ed. / W.M.M. Kessels; A. Delabie. S.n. : s.n., 2008. p. P-87-.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Remote plasma ALD of amorphous and anatase TiO2 studied by in-situ spectroscopic ellipsometry

AU - Keuning, W.

AU - Langereis, E.

AU - Hemmen, van, J.L.

AU - Muraza, O.

AU - Rebrov, E.

AU - Sanden, van de, M.C.M.

AU - Kessels, W.M.M.

PY - 2008

Y1 - 2008

M3 - Conference contribution

SP - P-87-

BT - Proceedings of the 8th International Conference on Atomic Layer Deposition (ALD 2008), June 29 - July 2008, Bruges, Belgium (Book of Abstracts)

A2 - Kessels, W.M.M.

A2 - Delabie, A.

PB - s.n.

CY - S.n.

ER -

Keuning W, Langereis E, Hemmen, van JL, Muraza O, Rebrov E , Sanden, van de MCM et al. Remote plasma ALD of amorphous and anatase TiO2 studied by in-situ spectroscopic ellipsometry. In Kessels WMM, Delabie A, editors, Proceedings of the 8th International Conference on Atomic Layer Deposition (ALD 2008), June 29 - July 2008, Bruges, Belgium (Book of Abstracts). S.n.: s.n. 2008. p. P-87-