Remote plasma ALD of amorphous and anatase TiO2 studied by in-situ spectroscopic ellipsometry

W. Keuning, E. Langereis, J.L. Hemmen, van, O. Muraza, E. Rebrov, M.C.M. Sanden, van de, W.M.M. Kessels

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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Original languageEnglish
Title of host publicationProceedings of the 8th International Conference on Atomic Layer Deposition (ALD 2008), June 29 - July 2008, Bruges, Belgium (Book of Abstracts)
EditorsW.M.M. Kessels, A. Delabie
Place of PublicationS.n.
Publishers.n.
PagesP-87-
Publication statusPublished - 2008

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