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Dive into the research topics of 'Relation between growth precursors and film properties for plasma deposition of a-Si:H at rates up to 100 Å/s'. Together they form a unique fingerprint.- Sort by
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W. M.M. Kessels, A. H.M. Smets, J. P.M. Hoefnagels, M. G.H. Boogaarts, D. C. Schram, M. C.M. Van de Sanden
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review